Functionalized Polyelectrolytes Assembling on NanoBioFETs for Biosensing Applications

have been used as the active channel in nano-BioFETs through bottom-up approaches. [ 8 ] Wafer scale nano-BioFETs have been successfully fabricated through complementary metal oxide semiconductor (CMOS) compatible top-down microfabrication process which facilitates the mass production of such devices. [ 9 ] In any case, nano-BioFETs share the same sensing principle by affi nity-based detection, whereby the (bio)receptors are immobilized on the device surface. When analytes bind to these receptors, they produce variations in the surface potential, which can be detected as a shift in the threshold voltage or a change in the sub-threshold swing of the transistor characteristics. [ 10 ]